ATLEX S
ATLEX-S-Series-Laser is a very compact UV-light source designed for low- and mid-range duty cycle S Applications
Features
Ultra compact size
Soft corona preionization
HV-solid state pulser
Laser head volume < 3l
TMC (Total-Metal-Ceramic) Vessel
Integrated vacuum pump & halogen filter
Totally air-cooled, active thermal management
RS-485, RS232, USB and fiber optic Interface for system integration
Flushable optics holder
Energy stabilization mode
Dynamic fan speed controls
Meets European CE-standard
RoHS compliance
Applications
Medicine (refractive surgery)
Spectroscopy
Micromachining
Testing and measurement
Specifications
| ATLEX-S Specifications | |||||
|---|---|---|---|---|---|
| Gas Medium | ArF | KrF | Units | ||
| Wavelength | 193 | 248 | nm | ||
| High Voltage Switching Technique | Solid State Switch | Solid State Switch | |||
| Max. Rep. Rate | 300 | 500 | 300 | 500 | Hz |
| Max. Pulse Energy 1 | 10 | 10 | 15 | 15 | mJ |
| Max. Average Power | 2,4 | 4 | 4 | 6 | W |
| Pulse Duration 2 | 5 – 8 | ns | |||
| Beam Dimensions 2 (V x H) | 4 x 6 | mm | |||
| Beam Divergence 2 (V x H) | 1 x 2 | mard | |||
| Energy Stability (standard deviation) | < 3 | % | |||
| Dimensions (LxWxH) | 630 x 400 x 300 | mm | |||
| Weight | 65 | kg | |||
| Cooling | Air | ||||
| Power requirement | 230 VAC / 6,3 A / 1 phase / 50-60 Hz | ||||
All specifications are typical data and subject to change without notice due to product improvements.
1 Measured at low rep.rates; allow 10% reduction of output energy and power for laser equipped with stabilization mode.
2 Typical value, FWHM
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