New industrial excimer lasers


TMC (Total-Metal-Ceramic) Vessel
Corona Preionization
Solid state switch
Extended Dynamic & Static Gas-Lifetime (Several Months)
Laser Head Volume 6 l
Air Cooled / Optional Liquid Cooled
RS-485, RS232, USB and fiber optic Interface for system integration
Flushable optics holder
Integrated 4-Valve System for Easy Gas Handling
Energy stabilization mode
Dynamic fan speed controls
Meets European CE-standard, RoHS compliant
Modular Design / Service Friendly


Model ATLEX-1000-L
Gas Medium ArF KrF Units
Wavelength 193 248 nm
High Voltage Switching Technique Solid State Switch -
Max. Pulse Energy 1 10 15 mJ
Max. Average Power 8.0 10.0 W
Max. Rep Rate 1000 Hz
Pulse Duration 2 5 - 8 ns
Beam Dimensions 2 (V x H) 6 x 4 mm
Beam Divergence 2 (V x H) 2 x 1 mrad
Energy Stability (standard deviation) < 2 %
Dimensions (L x W x H) 600 x 415 x 567 mm
Weight 70 kg
Cooling Cooling Air / Optional Liquid -
Power requirement 230 VAC / 10 A / 1 phase / 50-60 Hz -

All specifications are typical data and subject to change without notice due to product improvements.
1 Measured at low rep.rates; allow 10% reduction of output energy and power for laser equipped with stabilization mode.
2 Typical value, FWHM

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