IPEX-700
Medium-power excimer lasers
IPEX-700 Series lasers deliver high power ultraviolet laser machining combined with state-of-the-art performance. Incorporating LightMachinery’s patented exciPure™ technology, IPEX lasers offer MASSIVE gas lifetimes, superior optical stability and precise control of laser operating parameters.
10X Better, Powerful, Reliable, Compact, Simple to Operate
Easy to use, simple to service and economical to operate, IPEX-700 lasers combine the benefits of high precision excimer processing with the lowest total cost of ownership and highest uptime in the market today.
Features
exciPure™ technology for increddible 10X gas lifetimes and the lowest cost of operation
No expensive cryogenic gas purifier is required
EasyClean automated optics seals to retain gas fill and reduce downtime during optics maintenance
Optional High-Brightness optics for applications requiring low beam divergence or extended coherence length
High-stability optics mounts for ultimate beam pointing accuracy
Simple integration into industrial processing systems
Microsoft® Surface Pro 4 remote control for the ultimate in simple operation, can be operated as a tablet or with the keyboard
Benefits
Massive dynamic gas lifetime, low operating cost
Massive dynamic gas lifetime, low operating cost
Delivers 200 microradian pointing stability
No realignment required after cleaning or replacing optics
Fast, precise energy stabilization in internal, burst and external trigger modes
Excellent energy stability, better than 1.0% (KrF)
Removes particulates and maintains optics cleanliness
Applications
Pulsed Laser Deposition
Precision Manufacturing
Material Processing
Drilling
Wire Stripping
Scientific Research
LIDAR
Laser Induced Breakdown Spectroscopy
Specifications
| Wavelength | 193nm ArF | 248nm KrF | 308 XeCl | 351 XeF |
|---|---|---|---|---|
| Maximum Pulse Energy (mJ) IPEX-740 | 230 | 475 | 300 | 275 |
| Maximum Pulse Energy (mJ) IPEX-760 | 250 | 700 | 600 | 350 |
| Stabilized Pulse Energy (mJ) IPEX-740 | 150 | 400 | 250 | 225 |
| Stabilized Pulse Energy (mJ) IPEX-760 | 200 | 600 | 500 | 300 |
| Stabilized Average Power (W) | ||||
| IPEX-746 | 15 | 40 | 25 | 22 |
| IPEX-744 | 7.5 | 20 | 12 | 11 |
| IPEX-742 | 3.7 | 10 | 6 | 5.5 |
| IPEX-766 | 10 | 30 | 25 | 15 |
| IPEX-764 | 6 | 18 | 10 | 9 |
| IPEX-762 | 3 | 9 | 5 | 4.5 |
| Maximum Repetition Rate (Hz) | ||||
| IPEX-746 | 100 | 100 | 100 | 100 |
| IPEX-744 | 50 | 50 | 50 | 50 |
| IPEX-742 | 25 | 25 | 25 | 25 |
| IPEX-766 | 50 | 50 | 50 | 50 |
| IPEX-764 | 30 | 30 | 20 | 30 |
| IPEX-762 | 15 | 15 | 10 | 15 |
| Pulse Duration | 12 to 20 ns FWHM | |||
| Energy Stability, 1 Sigma | 1% (KrF) | |||
| Beam Dimensions (V x H) | IPEX-740 Series 12 x 26 mm | |||
| Beam Dimensions (V x H) | IPEX-760 Series 12 x 28 mm | |||
| Beam Divergence (V x H) | 1 x 3mrad or can be reduced to 0.25mrad with high brightness unstable resonator optics | |||
| Electrical Power Requirements | Single Phse, 200 - 240 V 50/60Hz | |||
| Cooling Requirements | Optional air cooling to 25Hz operation, water cooling at higher rep rates | |||
| Laser Gas | Premix or individual cylinders | |||
| Weight | 295kg (650lbs) | |||
Specifica/ons are subject to change.
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