VOLCANO® 750UV Laser Optics
VOLCANO® Line Beam systems can be designed with different line lengths up to 750mm and 1000mm. The use of solid state lasers emitting UV light at 343nm reduces the operating costs and increases the uptime of production tools remarkably, compared to systems using excimer lasers.
The LB systems are based on a rigid aluminum housing structure and the FALCON XXL projection lens gives a working distance of >200mm. A stable and solid system structure is needed to support the line beam optics. Line Beam Optics include a MBC (Manual Beam Control) camera system which allows to control and adjust position and angle of all laser emitted beams. The FALCON XXL design contains a window which seals the optics from the process chamber and protects against contaminations from the process. The energy density of >500mJ/cm² is obtained by using 6 TruMicro 8320 (20mJ specification) with 750mm x 20µm FWHM line beam. The Line Beam optics give a DoF ≥300µm for a 20µm FWHM small axis and a uniformity of p2p ≤10%.
Specifications
| Technical Data: VOLCANO® LB 750UV-4-8320 or LB 750UV-2-8340 | |
|---|---|
| Wavelength | 343 nm |
| Line length | 750mm (top-hat-profile) |
| Line width | 20-30µm FWHM (Gaussian profile) |
| Homogeneity | p2p ≤ 6% best focus |
| Energy density | ≥ 370mJ/cm²@ 20µm FWHM; ≥ 250mJ/cm² @ 30µm FWHM |
| Pulse duration | 15-20ns, can be extended by delay trigger scheme |
| Repetition rate | 10kHz |
| Laser | 4x TruMicro 8320 or 2x TruMicro 8340 (Trumpf Lasertechnik) |
| Diagnostics | laser power meter, substrate power meter, substrate beam profiler, fast photodiode |
| Technical Data: VOLCANO® LB 750UV-6-8320 or LB 750UV-3-8340 | |
| Wavelength | 343 nm |
| Line length | 750mm (top-hat-profile) |
| Line width | 20-30µm FWHM (Gaussian profile) |
| Homogeneity | p2p ≤ 6% best focus |
| DoF | ≥ 560mJ/cm² @ 20µm FWHM; ≥ 370mJ/cm² @ 30µm FWHM |
| Pulse duration | 15-20ns, can be extended by delay trigger scheme |
| Repetition rate | 10kHz |
| Laser | 6x TruMicro 8320 or 3x TruMicro 8340 (Trumpf Lasertechnik) |
| Diagnostics | laser power meter, substrate power meter, substrate beam profiler, fast photodiode |
Other line sizes and other configurations on request.
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