Laser Blade Debonder (LDB)

Laser Blade Debonder (LDB)

Fully automated LLO system

The LDB is optimized for High speed Laser Lift-Off (LLO) process independant of part size. This system combines a flexible workstation with an external laser associated to homogenizing optics to create a laser beam line for high troughput production.

The beam length is adjustable and automatically switchable in function of the application. Automation can be provided as an option with cassette or wafer loading including automated pre-alignment, robotics and machine vision.


Motorized X,Y,Z axes
308nm laser wavelength
Up to 45mm beam line length
>600 mJ/cm2 on the part
Off axis vision
User friendly softwares
CAD compatible
All granite structure
Class 1 machine


Laser Lift Off


Beam Delivery Unit
Wavelength 308 nm / Option: 248 nm
Energy density From 50 to 600 mJ/cm2 / Option: Trade-off line beam length
Rep rate max 200 Hz
Beam line length 22 or 45 mm with 75 mm in option
Beam line widh 1 or 1.2 mm
Depth of focus > 0.5 mm
Focus Range 25 mm / Option: Motorized
Attenuation range from 5 to 100%
Part Positionning
Processing area 200 x 200 mm
Travel range 450 x 300 mm
Resolution 1 µm
Repeatability < 2 µm
Absolutely accuracy < 2 µm with DMC calibration

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